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Maintenance kit for removable ion source probe

G7005-60170
EGP
Preventative maintenance kit, for removable ion source probe. Includes O-ring, 2.5 inch id, 2.75 inch od, 0.125 inch cross section (0905-1720), 2 canted coil spring, radial, 5/8 inch id (G7005-80105), seal assembly (G7005-60070)